2/9/2012	12:18:46 AM	Helium valve closed
2/9/2012	12:18:46 AM	H2 valve closed
2/9/2012	12:18:46 AM	BCl3 valve closed
2/9/2012	12:18:46 AM	PH3 valve closed
2/9/2012	12:18:46 AM	SiCl4 pre valve closed
2/9/2012	12:18:46 AM	SiCl4 post valve closed
2/9/2012	12:18:46 AM	Main Vac valve closed
2/9/2012	12:18:46 AM	Bypass valve closed
2/9/2012	12:18:46 AM	Bubbler valve closed
2/9/2012	12:18:46 AM	Helium MFC set to  0.000000
2/9/2012	12:18:46 AM	H2 MFC set to  0.000000
2/9/2012	12:18:46 AM	BCl3 MFC set to  0.000000
2/9/2012	12:18:46 AM	PH3 MFC set to  0.000000
2/9/2012	12:18:46 AM	SiCl4 MFC set to  0.000000
2/9/2012	12:18:46 AM	Bypass solenoid MFC set to  0.000000
2/9/2012	12:18:46 AM	Tube furnace set to 0
2/9/2012	12:38:46 AM	Helium valve closed
2/9/2012	12:38:46 AM	H2 valve closed
2/9/2012	12:38:46 AM	BCl3 valve closed
2/9/2012	12:38:46 AM	PH3 valve closed
2/9/2012	12:38:46 AM	SiCl4 pre valve closed
2/9/2012	12:38:46 AM	SiCl4 post valve closed
2/9/2012	12:38:46 AM	Main Vac valve closed
2/9/2012	12:38:46 AM	Bubbler valve closed
2/9/2012	12:38:46 AM	Bypass valve opened
2/9/2012	12:38:46 AM	Helium MFC set to  0.000000
2/9/2012	12:38:46 AM	H2 MFC set to  0.000000
2/9/2012	12:38:46 AM	BCl3 MFC set to  0.000000
2/9/2012	12:38:46 AM	PH3 MFC set to  0.000000
2/9/2012	12:38:46 AM	SiCl4 MFC set to  0.000000
2/9/2012	12:38:46 AM	Bypass solenoid MFC set to  0.000000
2/9/2012	12:38:46 AM	Tube furnace set to 0
2/9/2012	12:39:32 AM	Helium valve closed
2/9/2012	12:39:32 AM	H2 valve closed
2/9/2012	12:39:32 AM	BCl3 valve closed
2/9/2012	12:39:32 AM	PH3 valve closed
2/9/2012	12:39:32 AM	SiCl4 pre valve closed
2/9/2012	12:39:32 AM	SiCl4 post valve closed
2/9/2012	12:39:32 AM	Main Vac valve closed
2/9/2012	12:39:32 AM	Bubbler valve closed
2/9/2012	12:39:32 AM	Bypass valve opened
2/9/2012	12:39:32 AM	Helium MFC set to  0.000000
2/9/2012	12:39:32 AM	H2 MFC set to  0.000000
2/9/2012	12:39:32 AM	BCl3 MFC set to  0.000000
2/9/2012	12:39:32 AM	PH3 MFC set to  0.000000
2/9/2012	12:39:32 AM	SiCl4 MFC set to  0.000000
2/9/2012	12:39:32 AM	Bypass solenoid MFC set to  0.000000
2/9/2012	12:39:32 AM	Tube furnace set to 0
2/9/2012	12:40:32 AM	Helium valve closed
2/9/2012	12:40:32 AM	H2 valve closed
2/9/2012	12:40:32 AM	BCl3 valve closed
2/9/2012	12:40:32 AM	PH3 valve closed
2/9/2012	12:40:32 AM	SiCl4 pre valve closed
2/9/2012	12:40:32 AM	SiCl4 post valve closed
2/9/2012	12:40:32 AM	Bypass valve closed
2/9/2012	12:40:32 AM	Bubbler valve closed
2/9/2012	12:40:32 AM	Main Vac valve opened
2/9/2012	12:40:32 AM	Helium MFC set to  0.000000
2/9/2012	12:40:32 AM	H2 MFC set to  0.000000
2/9/2012	12:40:32 AM	BCl3 MFC set to  0.000000
2/9/2012	12:40:32 AM	PH3 MFC set to  0.000000
2/9/2012	12:40:32 AM	SiCl4 MFC set to  0.000000
2/9/2012	12:40:32 AM	Bypass solenoid MFC set to  0.000000
2/9/2012	12:40:33 AM	Tube furnace set to 0
2/9/2012	1:40:33 AM	Run finished at 1:40 AM
2/9/2012	1:55:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/9/2012	1:55:01 AM	Recipe started at 1:55 AM
2/9/2012	1:55:01 AM	Helium valve closed
2/9/2012	1:55:01 AM	H2 valve closed
2/9/2012	1:55:01 AM	BCl3 valve closed
2/9/2012	1:55:01 AM	PH3 valve closed
2/9/2012	1:55:01 AM	SiCl4 pre valve closed
2/9/2012	1:55:01 AM	SiCl4 post valve closed
2/9/2012	1:55:01 AM	Main Vac valve closed
2/9/2012	1:55:01 AM	Bypass valve closed
2/9/2012	1:55:01 AM	Bubbler valve closed
2/9/2012	1:55:01 AM	Helium MFC set to  0.000000
2/9/2012	1:55:01 AM	H2 MFC set to  0.000000
2/9/2012	1:55:01 AM	BCl3 MFC set to  0.000000
2/9/2012	1:55:01 AM	PH3 MFC set to  0.000000
2/9/2012	1:55:01 AM	SiCl4 MFC set to  0.000000
2/9/2012	1:55:01 AM	Bypass solenoid MFC set to  0.000000
2/9/2012	1:55:02 AM	Tube furnace set to 0
2/9/2012	1:55:05 AM	H2 valve closed
2/9/2012	1:55:05 AM	BCl3 valve closed
2/9/2012	1:55:05 AM	PH3 valve closed
2/9/2012	1:55:05 AM	SiCl4 pre valve closed
2/9/2012	1:55:05 AM	SiCl4 post valve closed
2/9/2012	1:55:05 AM	Main Vac valve closed
2/9/2012	1:55:05 AM	Bypass valve closed
2/9/2012	1:55:05 AM	Bubbler valve closed
2/9/2012	1:55:05 AM	Helium valve opened
2/9/2012	1:55:05 AM	Helium MFC set to  500.000000
2/9/2012	1:55:05 AM	H2 MFC set to  0.000000
2/9/2012	1:55:05 AM	BCl3 MFC set to  0.000000
2/9/2012	1:55:05 AM	PH3 MFC set to  0.000000
2/9/2012	1:55:05 AM	SiCl4 MFC set to  0.000000
2/9/2012	1:55:05 AM	Bypass solenoid MFC set to  0.000000
2/9/2012	1:55:05 AM	Tube furnace set to 0
2/9/2012	1:56:06 AM	Helium valve closed
2/9/2012	1:56:06 AM	H2 valve closed
2/9/2012	1:56:06 AM	BCl3 valve closed
2/9/2012	1:56:06 AM	PH3 valve closed
2/9/2012	1:56:06 AM	SiCl4 pre valve closed
2/9/2012	1:56:06 AM	SiCl4 post valve closed
2/9/2012	1:56:06 AM	Main Vac valve closed
2/9/2012	1:56:06 AM	Bypass valve closed
2/9/2012	1:56:06 AM	Bubbler valve closed
2/9/2012	1:56:06 AM	Helium MFC set to  0.000000
2/9/2012	1:56:06 AM	H2 MFC set to  0.000000
2/9/2012	1:56:06 AM	BCl3 MFC set to  0.000000
2/9/2012	1:56:06 AM	PH3 MFC set to  0.000000
2/9/2012	1:56:06 AM	SiCl4 MFC set to  0.000000
2/9/2012	1:56:06 AM	Bypass solenoid MFC set to  0.000000
2/9/2012	1:56:06 AM	Tube furnace set to 0
2/9/2012	1:56:07 AM	Run finished at 1:56 AM
2/9/2012	1:56:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/9/2012	1:59:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/9/2012	1:59:23 AM	Recipe started at 1:59 AM
2/9/2012	1:59:23 AM	Helium valve closed
2/9/2012	1:59:23 AM	H2 valve closed
2/9/2012	1:59:23 AM	BCl3 valve closed
2/9/2012	1:59:23 AM	PH3 valve closed
2/9/2012	1:59:23 AM	SiCl4 pre valve closed
2/9/2012	1:59:23 AM	SiCl4 post valve closed
2/9/2012	1:59:23 AM	Main Vac valve closed
2/9/2012	1:59:23 AM	Bubbler valve closed
2/9/2012	1:59:23 AM	Bypass valve opened
2/9/2012	1:59:23 AM	Helium MFC set to  0.000000
2/9/2012	1:59:23 AM	H2 MFC set to  0.000000
2/9/2012	1:59:23 AM	BCl3 MFC set to  0.000000
2/9/2012	1:59:23 AM	PH3 MFC set to  0.000000
2/9/2012	1:59:23 AM	SiCl4 MFC set to  0.000000
2/9/2012	1:59:23 AM	Bypass solenoid MFC set to  0.000000
2/9/2012	1:59:23 AM	Tube furnace set to 0
2/9/2012	2:00:21 AM	Helium valve closed
2/9/2012	2:00:21 AM	H2 valve closed
2/9/2012	2:00:21 AM	BCl3 valve closed
2/9/2012	2:00:21 AM	PH3 valve closed
2/9/2012	2:00:21 AM	SiCl4 pre valve closed
2/9/2012	2:00:21 AM	SiCl4 post valve closed
2/9/2012	2:00:21 AM	Main Vac valve closed
2/9/2012	2:00:21 AM	Bubbler valve closed
2/9/2012	2:00:21 AM	Bypass valve opened
2/9/2012	2:00:21 AM	Helium MFC set to  0.000000
2/9/2012	2:00:21 AM	H2 MFC set to  0.000000
2/9/2012	2:00:21 AM	BCl3 MFC set to  0.000000
2/9/2012	2:00:21 AM	PH3 MFC set to  0.000000
2/9/2012	2:00:21 AM	SiCl4 MFC set to  0.000000
2/9/2012	2:00:21 AM	Bypass solenoid MFC set to  0.000000
2/9/2012	2:00:21 AM	Tube furnace set to 0
2/9/2012	2:01:21 AM	Helium valve closed
2/9/2012	2:01:21 AM	H2 valve closed
2/9/2012	2:01:21 AM	BCl3 valve closed
2/9/2012	2:01:21 AM	PH3 valve closed
2/9/2012	2:01:21 AM	SiCl4 pre valve closed
2/9/2012	2:01:21 AM	SiCl4 post valve closed
2/9/2012	2:01:21 AM	Bypass valve closed
2/9/2012	2:01:21 AM	Bubbler valve closed
2/9/2012	2:01:21 AM	Main Vac valve opened
2/9/2012	2:01:21 AM	Helium MFC set to  0.000000
2/9/2012	2:01:21 AM	H2 MFC set to  0.000000
2/9/2012	2:01:21 AM	BCl3 MFC set to  0.000000
2/9/2012	2:01:21 AM	PH3 MFC set to  0.000000
2/9/2012	2:01:21 AM	SiCl4 MFC set to  0.000000
2/9/2012	2:01:21 AM	Bypass solenoid MFC set to  0.000000
2/9/2012	2:01:21 AM	Tube furnace set to 0
2/9/2012	2:01:22 AM	Run finished at 2:01 AM
2/9/2012	2:01:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/9/2012	1:47:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/9/2012	1:47:48 PM	Recipe started at 1:47 PM
2/9/2012	1:47:48 PM	Helium valve closed
2/9/2012	1:47:48 PM	H2 valve closed
2/9/2012	1:47:48 PM	BCl3 valve closed
2/9/2012	1:47:48 PM	PH3 valve closed
2/9/2012	1:47:48 PM	SiCl4 pre valve closed
2/9/2012	1:47:48 PM	SiCl4 post valve closed
2/9/2012	1:47:48 PM	Main Vac valve closed
2/9/2012	1:47:48 PM	Bypass valve closed
2/9/2012	1:47:48 PM	Bubbler valve closed
2/9/2012	1:47:48 PM	Helium MFC set to  0.000000
2/9/2012	1:47:48 PM	H2 MFC set to  0.000000
2/9/2012	1:47:48 PM	BCl3 MFC set to  0.000000
2/9/2012	1:47:48 PM	PH3 MFC set to  0.000000
2/9/2012	1:47:48 PM	SiCl4 MFC set to  0.000000
2/9/2012	1:47:48 PM	Bypass solenoid MFC set to  0.000000
2/9/2012	1:47:48 PM	Tube furnace set to 0
2/9/2012	1:47:51 PM	H2 valve closed
2/9/2012	1:47:51 PM	BCl3 valve closed
2/9/2012	1:47:51 PM	PH3 valve closed
2/9/2012	1:47:51 PM	SiCl4 pre valve closed
2/9/2012	1:47:51 PM	SiCl4 post valve closed
2/9/2012	1:47:51 PM	Main Vac valve closed
2/9/2012	1:47:51 PM	Bypass valve closed
2/9/2012	1:47:51 PM	Bubbler valve closed
2/9/2012	1:47:51 PM	Helium valve opened
2/9/2012	1:47:51 PM	Helium MFC set to  500.000000
2/9/2012	1:47:51 PM	H2 MFC set to  0.000000
2/9/2012	1:47:51 PM	BCl3 MFC set to  0.000000
2/9/2012	1:47:51 PM	PH3 MFC set to  0.000000
2/9/2012	1:47:51 PM	SiCl4 MFC set to  0.000000
2/9/2012	1:47:51 PM	Bypass solenoid MFC set to  0.000000
2/9/2012	1:47:52 PM	Tube furnace set to 0
2/9/2012	1:48:56 PM	Helium valve closed
2/9/2012	1:48:56 PM	H2 valve closed
2/9/2012	1:48:56 PM	BCl3 valve closed
2/9/2012	1:48:56 PM	PH3 valve closed
2/9/2012	1:48:56 PM	SiCl4 pre valve closed
2/9/2012	1:48:56 PM	SiCl4 post valve closed
2/9/2012	1:48:56 PM	Main Vac valve closed
2/9/2012	1:48:56 PM	Bypass valve closed
2/9/2012	1:48:56 PM	Bubbler valve closed
2/9/2012	1:48:56 PM	Helium MFC set to  0.000000
2/9/2012	1:48:56 PM	H2 MFC set to  0.000000
2/9/2012	1:48:56 PM	BCl3 MFC set to  0.000000
2/9/2012	1:48:56 PM	PH3 MFC set to  0.000000
2/9/2012	1:48:56 PM	SiCl4 MFC set to  0.000000
2/9/2012	1:48:56 PM	Bypass solenoid MFC set to  0.000000
2/9/2012	1:48:57 PM	Tube furnace set to 0
2/9/2012	1:48:58 PM	Run finished at 1:48 PM
2/9/2012	1:48:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/9/2012	1:51:14 PM	Bypass valve opened
2/9/2012	2:03:33 PM	Bypass valve closed
2/9/2012	2:05:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/9/2012	2:05:19 PM	Recipe started at 2:05 PM
2/9/2012	2:05:19 PM	Helium valve closed
2/9/2012	2:05:19 PM	H2 valve closed
2/9/2012	2:05:19 PM	BCl3 valve closed
2/9/2012	2:05:19 PM	PH3 valve closed
2/9/2012	2:05:19 PM	SiCl4 pre valve closed
2/9/2012	2:05:19 PM	SiCl4 post valve closed
2/9/2012	2:05:19 PM	Main Vac valve closed
2/9/2012	2:05:19 PM	Bubbler valve closed
2/9/2012	2:05:19 PM	Bypass valve opened
2/9/2012	2:05:19 PM	Helium MFC set to  0.000000
2/9/2012	2:05:19 PM	H2 MFC set to  0.000000
2/9/2012	2:05:19 PM	BCl3 MFC set to  0.000000
2/9/2012	2:05:19 PM	PH3 MFC set to  0.000000
2/9/2012	2:05:19 PM	SiCl4 MFC set to  0.000000
2/9/2012	2:05:19 PM	Bypass solenoid MFC set to  0.000000
2/9/2012	2:05:19 PM	Tube furnace set to 0
2/9/2012	2:06:26 PM	Helium valve closed
2/9/2012	2:06:26 PM	H2 valve closed
2/9/2012	2:06:26 PM	BCl3 valve closed
2/9/2012	2:06:26 PM	PH3 valve closed
2/9/2012	2:06:26 PM	SiCl4 pre valve closed
2/9/2012	2:06:26 PM	SiCl4 post valve closed
2/9/2012	2:06:26 PM	Main Vac valve closed
2/9/2012	2:06:26 PM	Bubbler valve closed
2/9/2012	2:06:26 PM	Bypass valve opened
2/9/2012	2:06:26 PM	Helium MFC set to  0.000000
2/9/2012	2:06:26 PM	H2 MFC set to  0.000000
2/9/2012	2:06:26 PM	BCl3 MFC set to  0.000000
2/9/2012	2:06:26 PM	PH3 MFC set to  0.000000
2/9/2012	2:06:26 PM	SiCl4 MFC set to  0.000000
2/9/2012	2:06:26 PM	Bypass solenoid MFC set to  0.000000
2/9/2012	2:06:27 PM	Tube furnace set to 0
2/9/2012	2:07:27 PM	Helium valve closed
2/9/2012	2:07:27 PM	H2 valve closed
2/9/2012	2:07:27 PM	BCl3 valve closed
2/9/2012	2:07:27 PM	PH3 valve closed
2/9/2012	2:07:27 PM	SiCl4 pre valve closed
2/9/2012	2:07:27 PM	SiCl4 post valve closed
2/9/2012	2:07:27 PM	Bypass valve closed
2/9/2012	2:07:27 PM	Bubbler valve closed
2/9/2012	2:07:27 PM	Main Vac valve opened
2/9/2012	2:07:27 PM	Helium MFC set to  0.000000
2/9/2012	2:07:27 PM	H2 MFC set to  0.000000
2/9/2012	2:07:27 PM	BCl3 MFC set to  0.000000
2/9/2012	2:07:27 PM	PH3 MFC set to  0.000000
2/9/2012	2:07:27 PM	SiCl4 MFC set to  0.000000
2/9/2012	2:07:27 PM	Bypass solenoid MFC set to  0.000000
2/9/2012	2:07:27 PM	Tube furnace set to 0
2/9/2012	2:07:28 PM	Run finished at 2:07 PM
2/9/2012	2:07:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/9/2012	2:23:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/9/2012	2:23:02 PM	Recipe started at 2:23 PM
2/9/2012	2:23:02 PM	Helium valve closed
2/9/2012	2:23:02 PM	H2 valve closed
2/9/2012	2:23:02 PM	BCl3 valve closed
2/9/2012	2:23:02 PM	PH3 valve closed
2/9/2012	2:23:02 PM	SiCl4 pre valve closed
2/9/2012	2:23:02 PM	SiCl4 post valve closed
2/9/2012	2:23:02 PM	Main Vac valve closed
2/9/2012	2:23:02 PM	Bypass valve closed
2/9/2012	2:23:03 PM	Bubbler valve closed
2/9/2012	2:23:03 PM	Helium MFC set to  0.000000
2/9/2012	2:23:03 PM	H2 MFC set to  0.000000
2/9/2012	2:23:03 PM	BCl3 MFC set to  0.000000
2/9/2012	2:23:03 PM	PH3 MFC set to  0.000000
2/9/2012	2:23:03 PM	SiCl4 MFC set to  0.000000
2/9/2012	2:23:03 PM	Bypass solenoid MFC set to  0.000000
2/9/2012	2:23:03 PM	Tube furnace set to 0
2/9/2012	2:23:06 PM	H2 valve closed
2/9/2012	2:23:06 PM	BCl3 valve closed
2/9/2012	2:23:06 PM	PH3 valve closed
2/9/2012	2:23:06 PM	SiCl4 pre valve closed
2/9/2012	2:23:06 PM	SiCl4 post valve closed
2/9/2012	2:23:06 PM	Main Vac valve closed
2/9/2012	2:23:06 PM	Bypass valve closed
2/9/2012	2:23:06 PM	Bubbler valve closed
2/9/2012	2:23:06 PM	Helium valve opened
2/9/2012	2:23:06 PM	Helium MFC set to  500.000000
2/9/2012	2:23:06 PM	H2 MFC set to  0.000000
2/9/2012	2:23:06 PM	BCl3 MFC set to  0.000000
2/9/2012	2:23:06 PM	PH3 MFC set to  0.000000
2/9/2012	2:23:06 PM	SiCl4 MFC set to  0.000000
2/9/2012	2:23:06 PM	Bypass solenoid MFC set to  0.000000
2/9/2012	2:23:06 PM	Tube furnace set to 0
2/9/2012	2:24:11 PM	Helium valve closed
2/9/2012	2:24:11 PM	H2 valve closed
2/9/2012	2:24:11 PM	BCl3 valve closed
2/9/2012	2:24:11 PM	PH3 valve closed
2/9/2012	2:24:11 PM	SiCl4 pre valve closed
2/9/2012	2:24:11 PM	SiCl4 post valve closed
2/9/2012	2:24:11 PM	Main Vac valve closed
2/9/2012	2:24:11 PM	Bypass valve closed
2/9/2012	2:24:11 PM	Bubbler valve closed
2/9/2012	2:24:11 PM	Helium MFC set to  0.000000
2/9/2012	2:24:11 PM	H2 MFC set to  0.000000
2/9/2012	2:24:11 PM	BCl3 MFC set to  0.000000
2/9/2012	2:24:11 PM	PH3 MFC set to  0.000000
2/9/2012	2:24:11 PM	SiCl4 MFC set to  0.000000
2/9/2012	2:24:11 PM	Bypass solenoid MFC set to  0.000000
2/9/2012	2:24:11 PM	Tube furnace set to 0
2/9/2012	2:24:12 PM	Run finished at 2:24 PM
2/9/2012	2:24:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/9/2012	2:26:47 PM	SiCl4 post valve opened
2/9/2012	2:26:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/9/2012	2:26:51 PM	Recipe started at 2:26 PM
2/9/2012	2:26:51 PM	Helium valve closed
2/9/2012	2:26:51 PM	H2 valve closed
2/9/2012	2:26:51 PM	BCl3 valve closed
2/9/2012	2:26:51 PM	PH3 valve closed
2/9/2012	2:26:51 PM	SiCl4 pre valve closed
2/9/2012	2:26:51 PM	SiCl4 post valve closed
2/9/2012	2:26:51 PM	Main Vac valve closed
2/9/2012	2:26:51 PM	Bubbler valve closed
2/9/2012	2:26:51 PM	Bypass valve opened
2/9/2012	2:26:51 PM	Helium MFC set to  0.000000
2/9/2012	2:26:51 PM	H2 MFC set to  0.000000
2/9/2012	2:26:51 PM	BCl3 MFC set to  0.000000
2/9/2012	2:26:51 PM	PH3 MFC set to  0.000000
2/9/2012	2:26:51 PM	SiCl4 MFC set to  0.000000
2/9/2012	2:26:51 PM	Bypass solenoid MFC set to  0.000000
2/9/2012	2:26:51 PM	Tube furnace set to 0
2/9/2012	2:27:40 PM	Helium valve closed
2/9/2012	2:27:40 PM	H2 valve closed
2/9/2012	2:27:40 PM	BCl3 valve closed
2/9/2012	2:27:40 PM	PH3 valve closed
2/9/2012	2:27:40 PM	SiCl4 pre valve closed
2/9/2012	2:27:40 PM	SiCl4 post valve closed
2/9/2012	2:27:40 PM	Main Vac valve closed
2/9/2012	2:27:40 PM	Bubbler valve closed
2/9/2012	2:27:40 PM	Bypass valve opened
2/9/2012	2:27:41 PM	Helium MFC set to  0.000000
2/9/2012	2:27:41 PM	H2 MFC set to  0.000000
2/9/2012	2:27:41 PM	BCl3 MFC set to  0.000000
2/9/2012	2:27:41 PM	PH3 MFC set to  0.000000
2/9/2012	2:27:41 PM	SiCl4 MFC set to  0.000000
2/9/2012	2:27:41 PM	Bypass solenoid MFC set to  0.000000
2/9/2012	2:27:41 PM	Tube furnace set to 0
2/9/2012	2:27:43 PM	Helium valve closed
2/9/2012	2:27:43 PM	H2 valve closed
2/9/2012	2:27:43 PM	BCl3 valve closed
2/9/2012	2:27:43 PM	PH3 valve closed
2/9/2012	2:27:43 PM	SiCl4 pre valve closed
2/9/2012	2:27:43 PM	SiCl4 post valve closed
2/9/2012	2:27:43 PM	Bypass valve closed
2/9/2012	2:27:43 PM	Bubbler valve closed
2/9/2012	2:27:43 PM	Main Vac valve opened
2/9/2012	2:27:43 PM	Helium MFC set to  0.000000
2/9/2012	2:27:43 PM	H2 MFC set to  0.000000
2/9/2012	2:27:43 PM	BCl3 MFC set to  0.000000
2/9/2012	2:27:43 PM	PH3 MFC set to  0.000000
2/9/2012	2:27:43 PM	SiCl4 MFC set to  0.000000
2/9/2012	2:27:43 PM	Bypass solenoid MFC set to  0.000000
2/9/2012	2:27:44 PM	Tube furnace set to 0
2/9/2012	2:27:45 PM	Run finished at 2:27 PM
2/9/2012	2:27:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/9/2012	2:28:09 PM	Main Vac valve closed
2/9/2012	2:28:30 PM	Helium MFC set to  100.000000
2/9/2012	2:28:36 PM	SiCl4 post valve opened
2/9/2012	2:28:38 PM	Helium valve opened
2/9/2012	2:29:28 PM	Helium MFC set to  200.000000
2/9/2012	2:29:40 PM	Helium MFC set to  300.000000
2/9/2012	2:31:06 PM	Helium valve closed
2/9/2012	3:06:07 PM	Bypass valve opened
2/9/2012	3:06:23 PM	Bypass valve closed
2/9/2012	3:08:09 PM	Bypass valve opened
2/9/2012	3:10:10 PM	Bypass valve closed
2/9/2012	3:10:21 PM	Helium valve opened
2/9/2012	3:10:27 PM	Helium MFC set to  500.000000
2/9/2012	3:11:15 PM	Helium valve closed
2/9/2012	3:16:16 PM	Bypass valve opened
2/9/2012	3:17:48 PM	Bypass valve closed
2/9/2012	3:17:49 PM	Main Vac valve opened
2/9/2012	3:22:35 PM	Main Vac valve closed
2/9/2012	3:22:38 PM	Helium valve opened
2/9/2012	3:23:48 PM	Helium valve closed
2/9/2012	3:23:59 PM	Bypass valve opened
2/9/2012	3:25:01 PM	Bypass valve closed
2/9/2012	3:25:02 PM	Main Vac valve opened
2/9/2012	3:29:22 PM	Main Vac valve closed
2/9/2012	3:29:23 PM	Helium valve opened
2/9/2012	3:30:33 PM	Helium valve closed
2/9/2012	3:30:40 PM	Bypass valve opened
2/9/2012	3:31:43 PM	Bypass valve closed
2/9/2012	3:31:44 PM	Main Vac valve opened
2/9/2012	3:36:00 PM	Main Vac valve closed
2/9/2012	3:36:01 PM	Helium valve opened
2/9/2012	3:37:07 PM	Helium valve closed
2/9/2012	3:37:08 PM	Main Vac valve opened
2/9/2012	3:37:09 PM	Main Vac valve closed
2/9/2012	3:37:10 PM	Bypass valve opened
2/9/2012	3:38:08 PM	Bypass valve closed
2/9/2012	3:38:09 PM	Main Vac valve opened
2/9/2012	3:42:50 PM	Main Vac valve closed
2/9/2012	3:42:51 PM	Helium valve opened
2/9/2012	3:44:00 PM	Helium valve closed
2/9/2012	3:44:01 PM	Bypass valve opened
2/9/2012	3:44:58 PM	Bypass valve closed
2/9/2012	3:44:58 PM	Main Vac valve opened
2/9/2012	3:53:31 PM	Main Vac valve closed
2/9/2012	3:53:33 PM	Helium valve opened
2/9/2012	3:54:43 PM	Helium valve closed
2/9/2012	3:54:46 PM	Bypass valve opened
2/9/2012	3:55:40 PM	Bypass valve closed
2/9/2012	3:55:41 PM	Main Vac valve opened
2/9/2012	3:59:11 PM	SiCl4 post valve closed
2/9/2012	4:10:18 PM	SiCl4 post valve opened
2/9/2012	4:11:32 PM	Main Vac valve closed
2/9/2012	4:11:39 PM	Helium MFC set to  500.000000
2/9/2012	4:11:41 PM	Helium valve opened
2/9/2012	4:12:51 PM	Helium valve closed
2/9/2012	4:12:53 PM	Bypass valve opened
2/9/2012	4:13:48 PM	Bypass valve closed
2/9/2012	4:13:48 PM	Main Vac valve opened
2/9/2012	4:19:41 PM	Main Vac valve closed
2/9/2012	4:19:44 PM	Helium valve opened
2/9/2012	4:20:54 PM	Helium valve closed
2/9/2012	4:20:56 PM	Bypass valve opened
2/9/2012	4:21:52 PM	Bypass valve closed
2/9/2012	4:21:52 PM	Main Vac valve opened
2/9/2012	4:27:38 PM	Main Vac valve closed
2/9/2012	4:27:52 PM	H2 MFC set to  500.000000
2/9/2012	4:27:56 PM	H2 valve opened
2/9/2012	4:28:23 PM	Helium MFC set to  0.000000
2/9/2012	4:29:04 PM	H2 valve closed
2/9/2012	4:29:47 PM	SiCl4 post valve closed
2/9/2012	4:34:03 PM	H2 MFC set to  0.000000
2/9/2012	4:34:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/9/2012	4:34:05 PM	Recipe started at 4:34 PM
2/9/2012	4:34:05 PM	Helium valve closed
2/9/2012	4:34:05 PM	H2 valve closed
2/9/2012	4:34:05 PM	BCl3 valve closed
2/9/2012	4:34:05 PM	PH3 valve closed
2/9/2012	4:34:05 PM	SiCl4 pre valve closed
2/9/2012	4:34:05 PM	SiCl4 post valve closed
2/9/2012	4:34:05 PM	Main Vac valve closed
2/9/2012	4:34:05 PM	Bypass valve closed
2/9/2012	4:34:05 PM	Bubbler valve closed
2/9/2012	4:34:05 PM	Helium MFC set to  0.000000
2/9/2012	4:34:05 PM	H2 MFC set to  0.000000
2/9/2012	4:34:05 PM	BCl3 MFC set to  0.000000
2/9/2012	4:34:05 PM	PH3 MFC set to  0.000000
2/9/2012	4:34:05 PM	SiCl4 MFC set to  0.000000
2/9/2012	4:34:05 PM	Bypass solenoid MFC set to  0.000000
2/9/2012	4:34:06 PM	Tube furnace set to 0
2/9/2012	4:34:09 PM	H2 valve closed
2/9/2012	4:34:09 PM	BCl3 valve closed
2/9/2012	4:34:09 PM	PH3 valve closed
2/9/2012	4:34:09 PM	SiCl4 pre valve closed
2/9/2012	4:34:09 PM	SiCl4 post valve closed
2/9/2012	4:34:09 PM	Main Vac valve closed
2/9/2012	4:34:09 PM	Bypass valve closed
2/9/2012	4:34:09 PM	Bubbler valve closed
2/9/2012	4:34:09 PM	Helium valve opened
2/9/2012	4:34:09 PM	Helium MFC set to  500.000000
2/9/2012	4:34:09 PM	H2 MFC set to  0.000000
2/9/2012	4:34:09 PM	BCl3 MFC set to  0.000000
2/9/2012	4:34:09 PM	PH3 MFC set to  0.000000
2/9/2012	4:34:09 PM	SiCl4 MFC set to  0.000000
2/9/2012	4:34:09 PM	Bypass solenoid MFC set to  0.000000
2/9/2012	4:34:09 PM	Tube furnace set to 0
2/9/2012	4:34:09 PM	Helium valve closed
2/9/2012	4:34:09 PM	H2 valve closed
2/9/2012	4:34:09 PM	BCl3 valve closed
2/9/2012	4:34:09 PM	PH3 valve closed
2/9/2012	4:34:09 PM	SiCl4 pre valve closed
2/9/2012	4:34:09 PM	SiCl4 post valve closed
2/9/2012	4:34:09 PM	Main Vac valve closed
2/9/2012	4:34:09 PM	Bypass valve closed
2/9/2012	4:34:09 PM	Bubbler valve closed
2/9/2012	4:34:09 PM	Helium MFC set to  0.000000
2/9/2012	4:34:09 PM	H2 MFC set to  0.000000
2/9/2012	4:34:09 PM	BCl3 MFC set to  0.000000
2/9/2012	4:34:09 PM	PH3 MFC set to  0.000000
2/9/2012	4:34:09 PM	SiCl4 MFC set to  0.000000
2/9/2012	4:34:09 PM	Bypass solenoid MFC set to  0.000000
2/9/2012	4:34:09 PM	Tube furnace set to 0
2/9/2012	4:34:10 PM	Run finished at 4:34 PM
2/9/2012	4:34:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/9/2012	4:48:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/9/2012	4:48:07 PM	Recipe started at 4:48 PM
2/9/2012	4:48:07 PM	Helium valve closed
2/9/2012	4:48:07 PM	H2 valve closed
2/9/2012	4:48:07 PM	BCl3 valve closed
2/9/2012	4:48:07 PM	PH3 valve closed
2/9/2012	4:48:07 PM	SiCl4 pre valve closed
2/9/2012	4:48:07 PM	SiCl4 post valve closed
2/9/2012	4:48:07 PM	Main Vac valve closed
2/9/2012	4:48:07 PM	Bubbler valve closed
2/9/2012	4:48:07 PM	Bypass valve opened
2/9/2012	4:48:07 PM	Helium MFC set to  0.000000
2/9/2012	4:48:07 PM	H2 MFC set to  0.000000
2/9/2012	4:48:08 PM	BCl3 MFC set to  0.000000
2/9/2012	4:48:08 PM	PH3 MFC set to  0.000000
2/9/2012	4:48:08 PM	SiCl4 MFC set to  0.000000
2/9/2012	4:48:08 PM	Bypass solenoid MFC set to  0.000000
2/9/2012	4:48:08 PM	Tube furnace set to 0
2/9/2012	4:49:04 PM	Helium valve closed
2/9/2012	4:49:04 PM	H2 valve closed
2/9/2012	4:49:04 PM	BCl3 valve closed
2/9/2012	4:49:04 PM	PH3 valve closed
2/9/2012	4:49:04 PM	SiCl4 pre valve closed
2/9/2012	4:49:04 PM	SiCl4 post valve closed
2/9/2012	4:49:04 PM	Main Vac valve closed
2/9/2012	4:49:04 PM	Bubbler valve closed
2/9/2012	4:49:04 PM	Bypass valve opened
2/9/2012	4:49:04 PM	Helium MFC set to  0.000000
2/9/2012	4:49:04 PM	H2 MFC set to  0.000000
2/9/2012	4:49:04 PM	BCl3 MFC set to  0.000000
2/9/2012	4:49:04 PM	PH3 MFC set to  0.000000
2/9/2012	4:49:04 PM	SiCl4 MFC set to  0.000000
2/9/2012	4:49:04 PM	Bypass solenoid MFC set to  0.000000
2/9/2012	4:49:04 PM	Tube furnace set to 0
2/9/2012	4:50:04 PM	Helium valve closed
2/9/2012	4:50:04 PM	H2 valve closed
2/9/2012	4:50:04 PM	BCl3 valve closed
2/9/2012	4:50:04 PM	PH3 valve closed
2/9/2012	4:50:04 PM	SiCl4 pre valve closed
2/9/2012	4:50:04 PM	SiCl4 post valve closed
2/9/2012	4:50:04 PM	Bypass valve closed
2/9/2012	4:50:04 PM	Bubbler valve closed
2/9/2012	4:50:04 PM	Main Vac valve opened
2/9/2012	4:50:04 PM	Helium MFC set to  0.000000
2/9/2012	4:50:04 PM	H2 MFC set to  0.000000
2/9/2012	4:50:04 PM	BCl3 MFC set to  0.000000
2/9/2012	4:50:04 PM	PH3 MFC set to  0.000000
2/9/2012	4:50:04 PM	SiCl4 MFC set to  0.000000
2/9/2012	4:50:04 PM	Bypass solenoid MFC set to  0.000000
2/9/2012	4:50:04 PM	Tube furnace set to 0
2/9/2012	4:50:05 PM	Run finished at 4:50 PM
2/9/2012	4:50:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/9/2012	5:10:26 PM	Helium MFC set to  10.000000
2/9/2012	5:10:27 PM	Helium valve opened
2/9/2012	5:10:44 PM	Helium MFC set to  20.000000
2/9/2012	5:11:20 PM	Helium valve closed
2/9/2012	5:11:58 PM	Main Vac valve closed
2/9/2012	5:12:16 PM	Main Vac valve opened
2/9/2012	5:12:19 PM	Helium valve opened
2/9/2012	5:12:22 PM	Helium valve closed
2/9/2012	5:13:03 PM	Recipe started at 5:13 PM
2/9/2012	5:13:03 PM	Helium valve closed
2/9/2012	5:13:03 PM	H2 valve closed
2/9/2012	5:13:03 PM	BCl3 valve closed
2/9/2012	5:13:03 PM	PH3 valve closed
2/9/2012	5:13:03 PM	SiCl4 pre valve closed
2/9/2012	5:13:03 PM	SiCl4 post valve closed
2/9/2012	5:13:03 PM	Bypass valve closed
2/9/2012	5:13:03 PM	Bubbler valve closed
2/9/2012	5:13:03 PM	Main Vac valve opened
2/9/2012	5:13:03 PM	Helium MFC set to  0.000000
2/9/2012	5:13:03 PM	H2 MFC set to  0.000000
2/9/2012	5:13:03 PM	BCl3 MFC set to  0.000000
2/9/2012	5:13:03 PM	PH3 MFC set to  0.000000
2/9/2012	5:13:03 PM	SiCl4 MFC set to  0.000000
2/9/2012	5:13:03 PM	Bypass solenoid MFC set to  0.000000
2/9/2012	5:13:03 PM	Tube furnace set to 0
2/9/2012	5:13:08 PM	Helium valve closed
2/9/2012	5:13:08 PM	H2 valve closed
2/9/2012	5:13:08 PM	BCl3 valve closed
2/9/2012	5:13:08 PM	PH3 valve closed
2/9/2012	5:13:08 PM	SiCl4 pre valve closed
2/9/2012	5:13:08 PM	SiCl4 post valve closed
2/9/2012	5:13:08 PM	Main Vac valve closed
2/9/2012	5:13:08 PM	Bypass valve closed
2/9/2012	5:13:08 PM	Bubbler valve closed
2/9/2012	5:13:08 PM	Helium MFC set to  0.000000
2/9/2012	5:13:08 PM	H2 MFC set to  0.000000
2/9/2012	5:13:08 PM	BCl3 MFC set to  0.000000
2/9/2012	5:13:08 PM	PH3 MFC set to  0.000000
2/9/2012	5:13:08 PM	SiCl4 MFC set to  0.000000
2/9/2012	5:13:08 PM	Bypass solenoid MFC set to  0.000000
2/9/2012	5:13:09 PM	Tube furnace set to 0
2/9/2012	5:13:12 PM	Helium valve closed
2/9/2012	5:13:12 PM	BCl3 valve closed
2/9/2012	5:13:12 PM	PH3 valve closed
2/9/2012	5:13:12 PM	SiCl4 pre valve closed
2/9/2012	5:13:12 PM	SiCl4 post valve closed
2/9/2012	5:13:12 PM	Main Vac valve closed
2/9/2012	5:13:12 PM	Bypass valve closed
2/9/2012	5:13:12 PM	Bubbler valve closed
2/9/2012	5:13:12 PM	H2 valve opened
2/9/2012	5:13:12 PM	Helium MFC set to  0.000000
2/9/2012	5:13:12 PM	H2 MFC set to  500.000000
2/9/2012	5:13:12 PM	BCl3 MFC set to  0.000000
2/9/2012	5:13:12 PM	PH3 MFC set to  0.000000
2/9/2012	5:13:12 PM	SiCl4 MFC set to  0.000000
2/9/2012	5:13:12 PM	Bypass solenoid MFC set to  0.000000
2/9/2012	5:13:12 PM	Tube furnace set to 0
2/9/2012	5:14:23 PM	Helium valve closed
2/9/2012	5:14:23 PM	BCl3 valve closed
2/9/2012	5:14:23 PM	PH3 valve closed
2/9/2012	5:14:23 PM	SiCl4 pre valve closed
2/9/2012	5:14:23 PM	SiCl4 post valve closed
2/9/2012	5:14:23 PM	Main Vac valve closed
2/9/2012	5:14:23 PM	Bypass valve closed
2/9/2012	5:14:23 PM	H2 valve opened
2/9/2012	5:14:23 PM	Bubbler valve opened
2/9/2012	5:14:23 PM	Helium MFC set to  0.000000
2/9/2012	5:14:23 PM	H2 MFC set to  500.000000
2/9/2012	5:14:23 PM	BCl3 MFC set to  0.000000
2/9/2012	5:14:23 PM	PH3 MFC set to  0.000000
2/9/2012	5:14:23 PM	SiCl4 MFC set to  0.000000
2/9/2012	5:14:23 PM	Bypass solenoid MFC set to  0.000000
2/9/2012	5:14:23 PM	Tube furnace set to 0
2/9/2012	5:14:24 PM	Helium valve closed
2/9/2012	5:14:24 PM	BCl3 valve closed
2/9/2012	5:14:24 PM	PH3 valve closed
2/9/2012	5:14:24 PM	SiCl4 pre valve closed
2/9/2012	5:14:24 PM	SiCl4 post valve closed
2/9/2012	5:14:24 PM	Main Vac valve closed
2/9/2012	5:14:24 PM	Bypass valve closed
2/9/2012	5:14:24 PM	H2 valve opened
2/9/2012	5:14:24 PM	Bubbler valve opened
2/9/2012	5:14:24 PM	Helium MFC set to  0.000000
2/9/2012	5:14:24 PM	H2 MFC set to  500.000000
2/9/2012	5:14:24 PM	BCl3 MFC set to  0.000000
2/9/2012	5:14:24 PM	PH3 MFC set to  0.000000
2/9/2012	5:14:24 PM	SiCl4 MFC set to  0.000000
2/9/2012	5:14:24 PM	Bypass solenoid MFC set to  0.000000
2/9/2012	5:14:24 PM	Tube furnace set to 1000
2/9/2012	5:39:24 PM	Helium valve closed
2/9/2012	5:39:24 PM	PH3 valve closed
2/9/2012	5:39:24 PM	Main Vac valve closed
2/9/2012	5:39:24 PM	Bypass valve closed
2/9/2012	5:39:24 PM	H2 valve opened
2/9/2012	5:39:24 PM	BCl3 valve opened
2/9/2012	5:39:24 PM	SiCl4 pre valve opened
2/9/2012	5:39:24 PM	SiCl4 post valve opened
2/9/2012	5:39:24 PM	Bubbler valve opened
2/9/2012	5:39:24 PM	Helium MFC set to  0.000000
2/9/2012	5:39:24 PM	H2 MFC set to  450.000000
2/9/2012	5:39:24 PM	BCl3 MFC set to  1.500000
2/9/2012	5:39:24 PM	PH3 MFC set to  0.000000
2/9/2012	5:39:24 PM	SiCl4 MFC set to  50.000000
2/9/2012	5:39:24 PM	Bypass solenoid MFC set to  0.000000
2/9/2012	5:39:24 PM	Tube furnace set to 1000
2/9/2012	5:41:36 PM	Helium valve closed
2/9/2012	5:41:36 PM	H2 valve closed
2/9/2012	5:41:36 PM	BCl3 valve closed
2/9/2012	5:41:36 PM	PH3 valve closed
2/9/2012	5:41:36 PM	SiCl4 pre valve closed
2/9/2012	5:41:36 PM	SiCl4 post valve closed
2/9/2012	5:41:36 PM	Main Vac valve closed
2/9/2012	5:41:36 PM	Bubbler valve closed
2/9/2012	5:41:36 PM	Bypass valve closed
2/9/2012	5:41:36 PM	Helium MFC set to  0.000000
2/9/2012	5:41:36 PM	H2 MFC set to  0.000000
2/9/2012	5:41:36 PM	BCl3 MFC set to  0.000000
2/9/2012	5:41:36 PM	PH3 MFC set to  0.000000
2/9/2012	5:41:36 PM	SiCl4 MFC set to  0.000000
2/9/2012	5:41:36 PM	Bypass solenoid MFC set to  760.000000
2/9/2012	5:41:36 PM	Tube furnace set to 0
2/9/2012	5:41:36 PM	Baratron reads 900.567492 Torr.  Emergency exit.
2/9/2012	6:01:50 PM	Run aborted at 6:01 PM
2/9/2012	6:02:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
2/9/2012	6:02:11 PM	Recipe started at 6:02 PM
2/9/2012	6:02:11 PM	Helium valve closed
2/9/2012	6:02:11 PM	H2 valve closed
2/9/2012	6:02:11 PM	BCl3 valve closed
2/9/2012	6:02:11 PM	PH3 valve closed
2/9/2012	6:02:11 PM	SiCl4 pre valve closed
2/9/2012	6:02:11 PM	SiCl4 post valve closed
2/9/2012	6:02:11 PM	Main Vac valve closed
2/9/2012	6:02:11 PM	Bypass valve closed
2/9/2012	6:02:11 PM	Bubbler valve closed
2/9/2012	6:02:11 PM	Helium MFC set to  0.000000
2/9/2012	6:02:11 PM	H2 MFC set to  0.000000
2/9/2012	6:02:11 PM	BCl3 MFC set to  0.000000
2/9/2012	6:02:11 PM	PH3 MFC set to  0.000000
2/9/2012	6:02:11 PM	SiCl4 MFC set to  0.000000
2/9/2012	6:02:11 PM	Bypass solenoid MFC set to  0.000000
2/9/2012	6:02:11 PM	Tube furnace set to 0
2/9/2012	6:02:11 PM	Run finished at 6:02 PM
2/9/2012	6:02:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
2/9/2012	6:02:13 PM	Bypass valve opened
2/9/2012	6:05:19 PM	Bypass valve closed
2/9/2012	6:05:32 PM	Bypass valve opened
2/9/2012	6:05:36 PM	Bypass valve closed
2/9/2012	6:05:36 PM	Main Vac valve opened
2/9/2012	6:05:46 PM	Main Vac valve closed
2/9/2012	6:05:53 PM	Main Vac valve opened
2/9/2012	6:43:14 PM	Main Vac valve closed
2/9/2012	6:43:20 PM	Main Vac valve opened
